The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 13, 1998
Filed:
Jul. 31, 1995
Toshihiro Yonezawa, Kitakoma-Gun, JP;
Tsuyoshi Argua, Kofu, JP;
Kunihiro Furuya, Nirasaki, JP;
Junichi Hagihara, Kofu, JP;
Tokyo Electron Limited, , JP;
Abstract
There is provided an inspection apparatus comprises, a transportation unit for transporting the object of inspection to a position opposite to the contact portion, a sucking holder movable toward and away from the contact portion and adapted to hold the object of inspection by suction; and a pressure contact mechanism provided separately from the transportation unit and adapted to press the sucking holder, thereby pressing the object of inspection against the contact portion. Thus the tranportation mechanism is separated from the pressure contact mechanism, the transportation mechanism can be reduced in weight, and the pressure contact mechanism can ensure setting of appropriate pressing. The operation time can be shortened, moreover, since the object of inspection is kept attached to the contact portion by the transportation mechanism as it is pressed against the contact portion. There is provided a transportation apparatus in which objects of transportation or inspection can be stably attracted or released without the possibility of their being broken by static electricity and without being influenced by their attitude. There is provided a temperature control apparatus used in an inspection apparatus and capable of efficiently heating or cooling an object of inspection, further, wherein a carrier plate section can be used in common for objects of inspection of different descriptions.