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For the Inventor, By the Inventor

Boise, ID, United States of America

Kevin L Beaman

USPTO Granted Patents = 34 

Average Co-Inventor Count = 2.5

ph-index = 11

Forward Citations = 726(Granted Patents)


Company Filing History:

goldMedal32 out of 37,972 
 
Micron Technology Incorporated
 patents
silverMedal2 out of 428 
 
Round Rock Research, LLC
 patents

Years Active: 2002-2013

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34 patents (USPTO):Explore Patents
1. 8518184 - Methods and systems for controlling temperature during microfeature workpiece processing, E.G., CVD deposition (2013-08-27),
2. 8384192 - Methods for forming small-scale capacitor structures (2013-02-26),
3. 8030170 - Methods of forming isolation structures, and methods of forming nonvolatile memory (2011-10-04),
4. 8017470 - Method of forming a structure over a semiconductor substrate (2011-09-13),
5. 7919829 - Liner for shallow trench isolation (2011-04-05),
6. 7906393 - Methods for forming small-scale capacitor structures (2011-03-15),
7. 7803678 - Method of forming a structure over a semiconductor substrate (2010-09-28),
8. 7771537 - Methods and systems for controlling temperature during microfeature workpiece processing, E.G. CVD deposition (2010-08-10),
9. 7651910 - Methods of forming programmable memory devices (2010-01-26),
10. 7647886 - Systems for depositing material onto workpieces in reaction chambers and methods for removing byproducts from reaction chambers (2010-01-19),
11. 7514366 - Methods for forming shallow trench isolation (2009-04-07),
12. 7422635 - Methods and apparatus for processing microfeature workpieces, e.g., for depositing materials on microfeature workpieces (2008-09-09),
13. 7399714 - Method of forming a structure over a semiconductor substrate (2008-07-15),
14. 7371647 - Methods of forming transistors (2008-05-13),
15. 7344755 - Methods and apparatus for processing microfeature workpieces; methods for conditioning ALD reaction chambers (2008-03-18),

Title: Kevin L. Beaman: Innovator in Microfeature Processing and Capacitor Technologies

Introduction: Kevin L. Beaman, an accomplished inventor based in Boise, ID, has made significant contributions to the field of technology with a remarkable portfolio of 34 patents. His innovations focus primarily on controlling temperature during microfeature workpiece processing and the development of small-scale capacitor structures.

Latest Patents: Among his latest patents, one highlights methods and systems for controlling temperature during microfeature workpiece processing, particularly in chemical vapor deposition (CVD). This invention provides a method that allows careful temperature management by monitoring both external and internal temperatures within the deposition chamber, ensuring optimal conditions for the deposition of heat-reflective materials. Another notable patent revolves around techniques for forming small-scale capacitor structures, specifically designed for DRAM capacitors. This implementation introduces a sequential method for fabricating capacitors by reacting two precursors for the deposition of a conductive layer, thus enhancing performance with a remarkably thin layer.

Career Highlights: Kevin L. Beaman has had a notable career, significantly impacting the technology industry while working with prominent companies such as Micron Technology Incorporated and Round Rock Research, LLC. His work has not only advanced existing technologies but has also paved the way for future innovations in semiconductor and capacitor technology.

Collaborations: Throughout his career, Beaman has collaborated with talented individuals such as Ronald Allen Weimer and Lingyi A. Zheng. These collaborations have resulted in further advancements in technology, showcasing the importance of teamwork in driving innovation.

Conclusion: Kevin L. Beaman stands out as a prolific inventor whose work in controlling temperature during processing and small-scale capacitor formation has contributed to significant advancements in technology. His 34 patents reflect a dedication to innovation that continues to inspire and shape the future of the industry.

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