Naperville, IL, United States of America

Kevin J Moeggenborg

USPTO Granted Patents = 33 

 

Average Co-Inventor Count = 3.2

ph-index = 12

Forward Citations = 380(Granted Patents)


Location History:

  • Aurora, IL (US) (1992 - 2010)
  • Naperville, IL (US) (1996 - 2014)
  • Midland, MI (US) (2016 - 2018)

Company Filing History:


Years Active: 1992-2018

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33 patents (USPTO):

Title: Innovations of Kevin J Moeggenborg: A Pioneer in Semiconductor Manufacturing

Introduction

Kevin J Moeggenborg, based in Naperville, IL, is a distinguished inventor known for his groundbreaking contributions to the field of semiconductor manufacturing. With an impressive portfolio of 33 patents, he has significantly advanced the technologies surrounding silicon carbide (SiC) substrates and chemical mechanical polishing (CMP) methods.

Latest Patents

Among his latest innovations is a method for manufacturing SiC wafers that are compatible with power device manufacturing technology. This inventive approach enables the production of silicon carbide substrates suitable for epitaxial growth in standard chambers typically used for processing silicon wafers. The design emphasizes strict limitations to avoid contamination, ensuring the integrity of the silicon wafers during processing. His innovation details a growth crucible with specific dimensions, emphasizing a height-to-width ratio that enhances the quality of the SiC boule produced.

Additionally, he developed compositions and methods for CMP applicable to silicon oxide, silicon nitride, and polysilicon materials. This advancement involves a polishing method using a specific CMP composition that includes ceria abrasive particles, effectively removing material from the substrate while maintaining optimal conditions.

Career Highlights

Throughout his career, Kevin has been associated with prominent companies including Cabot Microelectronics Corporation and Nalco Chemical Company. His roles within these organizations have allowed him to hone his skills and contribute to significant advancements in semiconductor processing technologies.

Collaborations

Kevin has collaborated with notable professionals in the industry, including Isaac K Cherian and Peter E Reed. These collaborations have facilitated the exchange of ideas and techniques that promote innovation within the semiconductor field.

Conclusion

Kevin J Moeggenborg's contributions to the realm of semiconductor technology through his patents and collaborations underscore his status as a leading inventor. His work not only propels advancements in wafer manufacturing technologies but also inspires future innovations in the industry.

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