The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 2012
Filed:
Feb. 11, 2008
Kevin Moeggenborg, Naperville, IL (US);
John Clark, Montgomery, IL (US);
Jeffrey Gilliland, Montgomery, IL (US);
Stanley Lesiak, Naperville, IL (US);
Susan Wilson, Yorkville, IL (US);
Vlasta Brusic, Geneva, IL (US);
Kevin Moeggenborg, Naperville, IL (US);
John Clark, Montgomery, IL (US);
Jeffrey Gilliland, Montgomery, IL (US);
Stanley Lesiak, Naperville, IL (US);
Susan Wilson, Yorkville, IL (US);
Vlasta Brusic, Geneva, IL (US);
Cabot Microelectronics Corporation, Aurora, IL (US);
Abstract
The invention is directed to a method of polishing a surface of an object that includes aluminum. The method includes the step of contacting the surface of the object with a soft polishing pad and a polishing composition. The polishing composition includes abrasive particles, an agent that oxidizes aluminum, and a liquid carrier to polish the surface of the object. The polishing composition includes the abrasive particles suspended in the liquid carrier, and is applied at a pH above about 7.