logo

For the Inventor, By the Inventor

Koshi, Japan

Kazuki Motomatsu

This inventor holds 7 USPTO granted patents and 1 published patent application. Top assignee: Tokyo Electron Limited. Active years: 2017-2026.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Kazuki Motomatsu. Retrieved from https://idiyas.com/inventor/kazuki-motomatsu

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

USPTO Granted Patents = 7 

% Patents Active = 71.4

Average Co-Inventor Count = 2.9

ph-index = 1

Forward Citations = 1(Granted Patents)


Company Filing History:

goldMedal7 out of 10,904 
 
Tokyo Electron Limited
 patents

Years Active: 2017-2026

Loading Chart...
7 patents (USPTO):Explore Patents
1. 12747504 - Substrate liquid processing apparatus and substrate liquid processing method (2026-09-29),
2. 12571120 - Plating apparatus (2026-03-10),
3. 11441225 - Substrate liquid processing apparatus (2022-09-13),
4. 10689762 - Substrate processing apparatus, substrate processing method and recording medium (2020-06-23),
5. 10584420 - Substrate liquid processing apparatus, substrate liquid processing method and recording medium (2020-03-10),
6. 10081033 - Heat exchange system, and substrate processing apparatus having same (2018-09-25),
7. 9822453 - Substrate processing apparatus, substrate processing method and storage medium storing substrate processing program (2017-11-21),

Title: Kazuki Motomatsu: Innovator in Substrate Processing Technology

Introduction

Kazuki Motomatsu is a prominent inventor based in Koshi, Japan. He has made significant contributions to the field of substrate processing technology, holding a total of 7 patents. His work focuses on enhancing the efficiency and accuracy of substrate processing apparatuses.

Latest Patents

One of his latest patents is a substrate liquid processing apparatus designed to perform precise heating control over a processing liquid on a substrate. This apparatus includes a substrate holder, a processing liquid supply, and a heating unit with multiple heating elements arranged in various zones. Another notable patent is a substrate processing apparatus that minimizes particle generation on a substrate while reducing the consumption of processing liquid. This innovative apparatus features a processing chamber, a vaporizing tank, and a control unit that efficiently vaporizes the processing liquid into gas.

Career Highlights

Kazuki Motomatsu is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work at the company has been instrumental in advancing substrate processing technologies.

Collaborations

He has collaborated with notable coworkers such as Satoshi Kaneko and Kazunori Sakamoto, contributing to various innovative projects within the company.

Conclusion

Kazuki Motomatsu's contributions to substrate processing technology reflect his dedication to innovation and excellence in his field. His patents demonstrate a commitment to improving manufacturing processes, making him a key figure in the industry.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
Loading…