The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 10, 2020
Filed:
Jun. 27, 2017
Tokyo Electron Limited, Tokyo, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A substrate liquid processing apparatusincludes a substrate holding unitconfigured to hold a substrate W; a processing liquid supply unitconfigured to supply a processing liquid Lonto a top surface of the substrate W held by the substrate holding unit; and a cover bodyconfigured to cover the substrate W. Here, the cover bodyincludes a ceiling unitdisposed above the substrate W, a sidewall unitdownwardly extended from the ceiling unit, and a heating unitprovided at the ceiling unitand configured to heat the processing liquid Lon the substrate W. The sidewall unitof the cover bodyis placed at an outer periphery side of the substrate W when the processing liquid Lon the substrate W is heated.