The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 25, 2018
Filed:
Jan. 07, 2015
Tokyo Electron Limited, Tokyo, JP;
Satoshi Kaneko, Koshi, JP;
Kazuki Motomatsu, Koshi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A heat exchange systemincludes heat exchangersandthat heat or cool a fluid passing therethrough; a fluid supply unitthat supplies the heating target fluid or the cooling target fluid into lower portions thereof; and a fluid discharge unitthat discharges the heated fluid or the cooled fluid from upper portions thereof. The fluid supply unit includes inlet linesandthrough which the fluid is introduced; a first manifoldlocated above the upper end portion of the heat exchangers and connected with the inlet lines; a gas exhaust linethat is connected to the first manifold and exhausts a gas mixed in the fluid; a supply linethat supplies the fluid from the first manifold. While passing through the heat exchangers from the lower portions toward the upper portions thereof, the fluid is heated or cooled.