Company Filing History:
Years Active: 2015-2025
Title: The Innovative Mind of Joern Weber: A Pioneer in EUV Technology
Introduction
Joern Weber, an accomplished inventor based in Aalen, Germany, has made significant contributions to the field of optical technology. With a total of six patents to his name, Weber is recognized for his innovative approaches to enhancing the functionality of reflective optical elements, particularly in the extreme ultraviolet (EUV) wavelength range.
Latest Patents
Among Joern Weber's latest patents is a groundbreaking method for treating a reflective optical element designed specifically for the EUV wavelength range. This method involves a sophisticated treating apparatus that allows the reflective optical element, equipped with a reflective coating, to be irradiated with pulses of radiation. The radiation source operates with a duration ranging from 1 microsecond to 1 second, while allowing for relative motion between the source and the optical element. Additionally, this innovative approach is most effective immediately after the application of the reflective coating within the coating chamber. The patents also detail a reflective optical element composed of a substrate, a reflection layer system, and a unique defect structure made up of channel-shaped defects. These defects facilitate the egress of hydrogen from the reflection layer system, significantly improving its diffusion properties by at least 20% compared to similar constructions lacking these defects. These advancements are particularly relevant for applications in EUV lithography, mask inspection, and wafer processing.
Career Highlights
Joern Weber currently works at Carl Zeiss SMT GmbH, a company renowned for its cutting-edge technologies in optical systems and lithography equipment. His career at Carl Zeiss SMT has been marked by a commitment to pushing the boundaries of innovation in the EUV technology sector. With each patent, Weber continues to solidify his reputation as a leading inventor in the field.
Collaborations
Throughout his career, Weber has had the privilege of collaborating with esteemed colleagues such as Gisela Von Blanckenhagen and Christian Grasse. These partnerships reflect a cooperative spirit and a shared dedication to advancing optical technology, which is pivotal in driving forward the innovations within their respective fields.
Conclusion
Joern Weber's contributions to optical technology, particularly with his advanced patents relating to reflective optical elements for the EUV wavelength range, exemplify his innovative prowess. His work at Carl Zeiss SMT GmbH and ongoing collaborations highlight the importance of teamwork in pushing technological boundaries. As he continues to explore new ideas, Weber undoubtedly remains a pivotal figure in the innovation landscape of optics.