Location History:
- Hwasung-si, KR (2015)
- Hwaseong-si, KR (2013 - 2022)
Company Filing History:
Years Active: 2013-2022
Title: Je-Woo Han: Innovator in Plasma Processing Technology
Introduction
Je-Woo Han is a prominent inventor based in Hwaseong-si, South Korea. He has made significant contributions to the field of semiconductor manufacturing, holding a total of 15 patents. His work focuses on advanced plasma processing methods that enhance the efficiency and effectiveness of semiconductor devices.
Latest Patents
One of Je-Woo Han's latest patents involves a plasma processing method and apparatus for manufacturing semiconductor devices. In this innovative method, a substrate is loaded onto a lower electrode within a chamber. A plasma power is applied to form plasma within the chamber. A voltage function of a nonsinusoidal wave, which includes a DC pulse portion and a ramp portion, is generated. This voltage function is designed to control the ion energy distribution at the surface of the substrate by adjusting the slope of the ramp portion and the duration ratio of the ramp portion to the cycle of the voltage function. A bias power of the nonsinusoidal wave is then applied to the lower electrode, optimizing the plasma processing for semiconductor applications.
Career Highlights
Je-Woo Han is currently employed at Samsung Electronics Co., Ltd., where he continues to push the boundaries of semiconductor technology. His expertise in plasma processing has positioned him as a key player in the development of innovative manufacturing techniques.
Collaborations
Throughout his career, Je-Woo Han has collaborated with notable colleagues, including Junho Yoon and Jaehong Park. These partnerships have fostered a creative environment that encourages the exchange of ideas and advancements in technology.
Conclusion
Je-Woo Han's contributions to plasma processing technology have significantly impacted the semiconductor industry. His innovative methods and collaborative spirit continue to drive advancements in manufacturing processes.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.