The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2015
Filed:
Apr. 08, 2014
Jae-hong Park, Seongnam-si, KR;
Min-joon Park, Yongin-si, KR;
Jun-ho Yoon, Suwon-si, KR;
Gyung-jin Min, Seongnam-si, KR;
Jin-young Park, Anyang-si, KR;
Je-woo Han, Hwasung-si, KR;
Jae-Hong Park, Seongnam-si, KR;
Min-Joon Park, Yongin-si, KR;
Jun-Ho Yoon, Suwon-si, KR;
Gyung-Jin Min, Seongnam-si, KR;
Jin-Young Park, Anyang-si, KR;
Je-Woo Han, Hwasung-si, KR;
Abstract
A bowing control pattern is formed on an intermediate layer. A hardmask pattern is formed on the bowing control layer. The hardmask pattern has a first opening, and the bowing control pattern has a second opening. A third opening passes through the intermediate layer and is connected to the second opening. The bowing control pattern includes first and second edges on a lower end of the second opening, and a third edge on an upper end of the second opening. When a first point on the first edge, a second point on the second edge, and a third point on a horizontal line passing through the third edge are defined, an intersecting angle between a first side from the first point to the second point, and a second side from the second point to the third point is from about 50° to about 80°.