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Years Active: 1997-2015
Title: Hideaki Kikuchi: Innovator in Ferroelectric Device Manufacturing
Introduction
Hideaki Kikuchi is a prominent inventor based in Kawasaki, Japan, known for his significant contributions to the field of semiconductor devices and ferroelectric materials. With a remarkable portfolio of 15 patents, Kikuchi has been instrumental in advancing technologies that enhance the performance and reliability of electronic components.
Latest Patents
Among his latest innovations, Kikuchi has developed a method of manufacturing a FeRAM (Ferroelectric Random Access Memory) device. This technique involves the formation of a lower electrode film, a ferroelectric film, and an upper electrode film on an insulating film that covers a transistor on a semiconductor substrate. Additionally, a platinum film serves as a cap layer on the upper electrode film. The process utilizes a hard mask composed of a titanium nitride film and a silicon oxide film in a predetermined pattern, facilitating the etching of the platinum film and the upper electrode film. The result is a ferroelectric capacitor formed by etching the ferroelectric film and the lower electrode film, ultimately encased with an insulating protective film.
Kikuchi's research also led to a method for creating a semiconductor device that incorporates a ferroelectric capacitor. In this approach, a ferroelectric capacitor with a ferroelectric film is strategically positioned above a semiconductor substrate, followed by the formation of wiring directly connected to the capacitor’s electrodes. A silicon oxide film, characterized by superior processability compared to aluminum oxide, is then applied, minimizing damage to the ferroelectric capacitor during the insulating film's application.
Career Highlights
Throughout his career, Kikuchi has worked with notable companies such as Fujitsu Semiconductor Limited and Fujitsu Corporation. His roles in these organizations have allowed him to hone his skills and contribute to cutting-edge innovations in semiconductor technology.
Collaborations
In his endeavors, Kikuchi has collaborated with respected professionals such as Kouichi Nagai and Genichi Komuro. These partnerships have fostered a productive exchange of ideas and breakthroughs in the domain of ferroelectric devices.
Conclusion
Hideaki Kikuchi's remarkable contributions to semiconductor technology and his innovative approaches to manufacturing ferroelectric devices have positioned him as a key figure in the industry. His patents not only reflect his technical expertise but also his commitment to advancing the field, ultimately enhancing the performance of electronic systems. As technology continues to evolve, Kikuchi’s innovations are likely to play a pivotal role in shaping the future of semiconductor applications.