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Kanagawa, Japan

Ulvac, Inc.

USPTO Granted Patents = 441

CIPO Patents = 9

EPO Patents = 130

Trademarks = 16

Forward Citations = 1,306

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929 inventors (with patents filed for the assignee):

Kyuzo Nakamura (23 out of 43 patents)

Yoshinori Fujii (21 out of 21 patents)

Koukou Suu (19 out of 20 patents)

4. Satoru Ishibashi (19 out of 21 patents)

5. Hirofumi Minami (17 out of 19 patents)

6. Hiroshi Nagata (16 out of 48 patents)

7. Shinya Nakamura (14 out of 28 patents)

8. Satoru Takasawa (14 out of 14 patents)

9. Noriaki Tani (14 out of 23 patents)

10. Yoshinori Shingaki (12 out of 12 patents)

11. John Rozen (11 out of 47 patents)

12. Yohei Ogawa (11 out of 14 patents)

13. Ryuichiro Kamimura (11 out of 11 patents)

14. Michio Ishikawa (11 out of 12 patents)

15. Junpei Yuyama (11 out of 15 patents)

Core Competencies:

Silicon Nitride Film

Magnetron Sputtering

Vacuum Processing

Plasma Processing

Sputtering Target

Freeze-Drying Device

Thin Film Transistor

Electrostatic Chuck

High-Frequency Power Circuit

Oxide Semiconductor

Substrate Transport Device

Deep Ultraviolet LED

441 patents: Sort by Forward Citations

1. 12476090 - Method of depositing silicon nitride film, apparatus for depositing film, and silicon nitride film (2025-11-18),

2. 12469711 - Etching method (2025-11-11),

3. 12293905 - Cathode unit for magnetron sputtering apparatus and magnetron sputtering apparatus (2025-05-06),

4. 12288709 - Vacuum processing apparatus and vacuum processing method using the same (2025-04-29),

5. 12217969 - Silicon dry etching method (2025-02-04),

6. 12205795 - Plasma processing device (2025-01-21),

7. 12169886 - Display device, display method, and storage medium (2024-12-17),

8. 12112929 - Cathode unit for magnetron sputtering apparatus and magnetron sputtering apparatus (2024-10-08),

9. 12092398 - Freeze-drying device and freeze-drying method (2024-09-17),

10. 12040153 - Ion gun (2024-07-16),

11. 12020942 - Etching method (2024-06-25),

12. 12014946 - Electrostatic chuck, vacuum processing apparatus, and substrate processing method (2024-06-18),

13. 12012650 - Sputtering target and method of producing sputtering target (2024-06-18),

14. 11972932 - Deposition method and deposition apparatus (2024-04-30),

15. 11935936 - Aluminum alloy film, method of producing the same, and thin film transistor (2024-03-19),

ULVAC, Inc. is a global leader in vacuum technology and solutions, providing a wide range of innovative products and services. With over 60 years of experience, ULVAC offers advanced vacuum pumps, thin film deposition systems, leak detectors, and more to various industries such as semiconductor, electronics, automotive, and healthcare. Their cutting-edge solutions contribute to the advancement of technology and help customers achieve enhanced productivity and efficiency. Learn more about ULVAC and their products at their official website.

This text is generated by artificial intelligence and may not be accurate.

Company Badge

USPTO Data Jan 1 1976 - Dec 9 2025

441 Patents

#9 in Kanagawa

#400 in Japan

#2,091 in the World

Kanagawa, Japan

Ulvac, Inc.

Forward Citations = 1,306

929 inventors:

Kyuzo Nakamura (23 out of 43 patents)

Yoshinori Fujii (21 out of 21 patents)

Koukou Suu (19 out of 20 patents)

4. Satoru Ishibashi (19 out of 21 patents)

5. Hirofumi Minami (17 out of 19 patents)

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