The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 29, 2025
Filed:
Mar. 02, 2022
Samsung Display Co., Ltd., Yongin-si, KR;
Ulvac, Inc., Chigasaki, JP;
Kyung Hoon Chung, Seongnam-si, KR;
Masao Nishiguchi, Chigasaki, JP;
Daisuke Iwase, Chigasaki, JP;
Ki Jun Roh, Cheonan-si, KR;
Man Soo Jang, Anyang-si, KR;
SAMSUNG DISPLAY CO., LTD., Yongin-si, KR;
ULVAC, INC., Chigasaki, JP;
Abstract
A vacuum processing apparatus including: a plurality of transport chambers arranged in order along a first direction; a plurality of process chambers connected to the transport chambers along a second direction that is perpendicular to the first direction; and a position conversion chamber connected to a first transport chamber among the transport chambers. The transport chambers include a rotational movement stage that rotates about a rotation axis that is perpendicular to the first direction and the second direction, and moves along a plane formed by the first direction and the second direction.