The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 20, 2026

Filed:

Dec. 12, 2023
Applicant:

Ulvac, Inc., Kanagawa, JP;

Inventors:

Takahito Kimoto, Kanagawa, JP;

Masashi Yasuda, Kanagawa, JP;

Toshiharu Kurauchi, Kanagawa, JP;

Shunsuke Sasaki, Kanagawa, JP;

Assignee:

ULVAC, INC., Kanagawa, JP;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/24 (2006.01);
U.S. Cl.
CPC ...
C23C 14/243 (2013.01);
Abstract

Provided is an evaporation source for use in a vacuum evaporation apparatus, the evaporation source restricting a local overheating and planning prolonged lifetime. The evaporation source includes: a boat main body having a containing part for the evaporation material; rising plate parts each rising upward from both ends as seen in one direction of the boat main body; and electrode mounting plate parts each extending outward from the respective upper ends of the rising plate parts. The boat main body is heated by applying electric power across both the electrode mounting plate parts, thereby causing the evaporation material inside the containing part to be evaporated. At this time, the rising plate parts are provided with dividing passages for the applied electric current.


Find Patent Forward Citations

Kimoto, Takahito. (2026). Evaporation source for vacuum evaporation apparatus (U.S. Patent No. 12768029). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12768029

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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