The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 2009
Filed:
Jul. 29, 2005
Hideaki Kikuchi, Kawasaki, JP;
Kouichi Nagai, Kawasaki, JP;
Hideaki Kikuchi, Kawasaki, JP;
Kouichi Nagai, Kawasaki, JP;
Fujitsu Limited, Kawasaki, JP;
Abstract
An AlOfilm with a thickness greater than that of a wiring is formed as a protective film, and then the AlOfilm is polished by CMP until a conductive barrier film is exposed. Namely, CMP is applied to the AlOfilm by utilizing the conductive barrier film as a stopper film. Next, a silicon oxide film is formed over the entire surface by, for example, a high-density plasma method, and then the surface thereof is flattened. Subsequently, another AlOfilm is formed on the silicon oxide film as a protective film for preventing intrusion of hydrogen or moisture. Further, another silicon oxide film is formed on the AlOfilm, for example, by a high-density plasma method. Then, a via hole reaching the conductive barrier film is formed through the silicon oxide film, the AlOfilm and the silicon oxide film, and then a W plug is embedded therein.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile