Hao-Chieh Liu

Title: Hao-Chieh Liu: Innovator in Semiconductor Technology

Introduction

Hao-Chieh Liu is a prominent inventor based in Taipei, Taiwan. He has made significant contributions to the field of microelectronics, particularly in the development of innovative etching processes and semiconductor device fabrication methods. With a total of 9 patents to his name, Liu's work has had a substantial impact on the semiconductor industry.

Latest Patents

One of Liu's latest patents is an etching process that involves a method for etching a pattern within a silicon-containing dielectric layer on a substrate used in microelectronics fabrication. This method employs a plasma-activated reactive gas mixture, allowing for precise control over the etch rate, etch rate ratio, and pattern aspect ratio by adjusting the gas composition. The process includes placing a silicon substrate within a reactor chamber, filling it with a reactive gas mixture, and forming a plasma to create an optimized etching environment.

Another notable patent is a method for forming a plug or damascene trench on a semiconductor device. This method consists of several steps, including depositing a dielectric layer made of hydrogen silsesquioxane (HSQ) and a hard mask material. The process involves curing the dielectric layer with e-beam technology and selectively etching to create openings, which are then filled with metal or polysilicon.

Career Highlights

Liu has worked with several notable companies in the semiconductor industry, including Vanguard International Semiconductor Corporation and Winbond Electronics Corporation. His experience in these organizations has allowed him to refine his skills and contribute to advancements in semiconductor technology.

Collaborations

Liu has collaborated with esteemed colleagues such as Erik S. Jeng and Bi-Ling Chen. These partnerships have fostered innovation and have been instrumental in the development of his patented technologies.

Conclusion

Hao-Chieh Liu is a distinguished inventor whose work in semiconductor technology continues to influence the industry. His innovative patents and collaborations highlight his commitment to advancing microelectronics.