Eindhoven, Netherlands

Frank Staals

USPTO Granted Patents = 58 

 

Average Co-Inventor Count = 3.8

ph-index = 5

Forward Citations = 79(Granted Patents)

Forward Citations (Not Self Cited) = 64(Dec 10, 2025)


Inventors with similar research interests:


Company Filing History:


Years Active: 2006-2025

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Areas of Expertise:
Computational Metrology
Lithographic Apparatus
Focus Performance Measurement
Control Parameters Determination
Wavefront Optimization
Metrology Robustness
Process Monitoring
Fingerprint Analysis
Reticle Optimization
Topographical Variation Measurement
Aerial Pattern Reconstruction
Laser Metric Calculation
58 patents (USPTO):Explore Patents

Certainly! Here is the article about inventor Frank Staals:

Title: The Innovative Mind of Frank Staals

Introduction:

Frank Staals, a prolific inventor based in Eindhoven, Netherlands, is renowned for his exceptional contributions to the field of lithography with a staggering number of 53 patents under his belt.

Latest Patents:

1. Method for controlling a lithographic apparatus and associated apparatuses: Frank's method revolutionizes lithographic processes by optimizing control of the apparatus based on substrate-specific metrology data and performance parameters.

2. Wavefront optimization for tuning scanner based on performance matching: This patent highlights Frank's ingenuity in determining wavefront parameters crucial for enhancing the performance of patterning processes.

Career Highlights:

At the forefront of innovation, Frank Staals is a distinguished member of the renowned company ASML Netherlands B.V., a global leader in semiconductor manufacturing equipment. His groundbreaking ideas have significantly impacted the technological landscape, particularly in lithography.

Collaborations:

In his pursuit of excellence, Frank collaborates closely with esteemed coworkers such as Wim Tjibbo Tel and Paul Christiaan Hinnen. Together, they form a dynamic team driving advancements in the intricate realm of lithographic processes.

Conclusion:

In conclusion, Frank Staals stands as a shining example of a visionary inventor whose relentless pursuit of innovation continues to shape the future of lithography. His remarkable patents and collaborations underscore his profound impact on the industry, solidifying his legacy as a trailblazer in the world of technology.

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