The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 29, 2025
Filed:
Feb. 17, 2020
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Frank Staals, Eindhoven, NL;
Simon Hendrik Celine Van Gorp, Oud-Turnhout, BE;
Assignee:
ASML NETHERLANDS B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2005.12);
U.S. Cl.
CPC ...
G03F 7/70525 (2012.12); G03F 7/70625 (2012.12); G03F 7/70633 (2012.12); G03F 7/70641 (2012.12); G03F 7/70725 (2012.12);
Abstract
A method for configuring an apparatus for providing structures to a layer on a substrate, the method including: obtaining first data including substrate specific data as measured and/or modeled before the providing of the structures to the layer on the substrate; and determining a configuration of the apparatus for at least two different control regimes based on the first data and the use of a common merit function including parameters associated with the at least two control regimes.