This inventor holds 39 USPTO granted patents and 4 published patent applications, primarily in Semiconductor Processing. Top assignees: Novellus Systems Incorporated, Tektronix, Inc., International Business Machines Corporation. Active years: 1989-2014.
Company Filing History:
33 out of 993Â 
3 out of 2,758Â 
1 out of 166,159Â 
Years Active: 1989-2014
Areas of Expertise:
Title: The Innovations of Evan E. Patton: A Pioneer in Semiconductor Processing
Introduction: Evan E. Patton, based in Portland, OR, is an esteemed inventor known for his significant contributions to the field of semiconductor processing. With an impressive portfolio of 39 patents, Patton has demonstrated his innovative capacity through a series of groundbreaking inventions aimed at enhancing wafer processing techniques.
Latest Patents: Among his latest innovations is the "Sequential Station Tool for Wet Processing of Semiconductor Wafers." This invention outlines methods and apparatus for processing semiconductor wafers in a sequential manner. The sequential processes utilize multi-station processing modules, which strategically divide comprehensive wafer procedures into sub-processes. Each sub-process is optimized to enhance wafer-to-wafer uniformity, result quality, and overall throughput. One exemplary embodiment includes a copper electroplating module featuring distinct stations for wetting, initiation, seed layer repair, filling, overburden, reclaiming, and rinsing, showcasing Patton's ingenuity and attention to detail in semiconductor technology.
Career Highlights: Throughout his career, Evan E. Patton has worked with notable companies, including Novellus Systems Incorporated. His extensive experience in the semiconductor industry has equipped him with the knowledge and expertise necessary to develop innovative solutions that address the challenges faced in wafer processing.
Collaborations: Patton has collaborated with accomplished professionals in his field, including Jonathan David Reid and Steven T. Mayer. These collaborations have fostered an environment of shared knowledge and innovation, further propelling advancements in semiconductor processing technologies.
Conclusion: In summary, Evan E. Patton's contributions to the semiconductor industry through his numerous patents and collaborative efforts have positioned him as a key figure in innovation. His latest patent on the sequential station tool reflects the continuous advancements being made in wafer processing, emphasizing the importance of optimizing processes for improved quality and efficiency.