The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 15, 2005
Filed:
Aug. 10, 2001
Steven T. Mayer, Lake Oswego, OR (US);
R. Marshall Stowell, West Linn, OR (US);
Evan E. Patton, Portland, OR (US);
Seshasayee Varadarajan, Wilsonville, OR (US);
Steven T. Mayer, Lake Oswego, OR (US);
R. Marshall Stowell, West Linn, OR (US);
Evan E. Patton, Portland, OR (US);
Seshasayee Varadarajan, Wilsonville, OR (US);
Novellus Systems, Inc., San Jose, CA (US);
Abstract
The present invention provides apparatus and methods for controlling flow dynamics of a plating fluid during a plating process. The invention achieves this fluid control through use of a diffuser membrane. Plating fluid is pumped through the membrane; the design and characteristics of the membrane provide a uniform flow pattern to the plating fluid exiting the membrane. Thus a work piece, upon which a metal or other conductive material is to be deposited, is exposed to a uniform flow of plating fluid.