The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 2005
Filed:
Dec. 11, 2002
Steven T. Mayer, Lake Oswego, OR (US);
Evan E. Patton, Portland, OR (US);
Robert L. Jackson, San Jose, CA (US);
Jonathan D. Reid, Sherwood, OR (US);
Steven T. Mayer, Lake Oswego, OR (US);
Evan E. Patton, Portland, OR (US);
Robert L. Jackson, San Jose, CA (US);
Jonathan D. Reid, Sherwood, OR (US);
Novellus Systems, Inc., San Jose, CA (US);
Abstract
An electroplating apparatus prevents anode-mediated degradation of electrolyte additives by creating a mechanism for maintaining separate anolyte and catholyte and preventing mixing thereof within a plating chamber. The separation is accomplished by interposing a porous chemical transport barrier between the anode and cathode. The transport barrier limits the chemical transport (via diffusion and/or convection) of all species but allows migration of ionic species (and hence passage of current) during application of sufficiently large electric fields within electrolyte.