Location History:
- San Jose, CA (US) (1987 - 2010)
- Lake Oswego, OR (US) (2005 - 2011)
Company Filing History:
7 out of 164,197 
4 out of 993 
4 out of 13,713 
Years Active: 1987-2011
Title: The Innovative Contributions of Robert L. Jackson
Introduction
Robert L. Jackson is a prominent inventor based in San Jose, California. He holds a total of 15 patents that showcase his expertise in electroplating and deposition processes. His work has significantly impacted the field of materials science and engineering.
Latest Patents
One of his latest patents is a process for electroplating metals into microscopic recessed features. This patent describes several techniques aimed at reducing or mitigating the formation of seams and voids during the electroplating of microscopic features. The use of cathodic polarization is highlighted as a method to counteract the negative effects of introducing a substrate plated with a seed layer into an electroplating solution. Additionally, diffusion-controlled electroplating techniques are discussed to ensure bottom-up filling of trenches and vias, preventing sidewalls from merging and creating defects. Another notable patent involves a pulsed deposition process for tungsten nucleation. This method includes exposing a substrate to a gaseous mixture containing a tungsten precursor and a reducing gas, facilitating the deposition of a tungsten nucleation layer. The process is designed to remove reaction by-products and includes a cyclic deposition process to enhance efficiency.
Career Highlights
Throughout his career, Robert L. Jackson has worked with several esteemed companies, including IBM and Novellus Systems Incorporated. His contributions to these organizations have been instrumental in advancing their technological capabilities.
Collaborations
Robert has collaborated with notable coworkers such as Steven T. Mayer and Evan E. Patton. Their combined expertise has fostered innovation and development in their respective fields.
Conclusion
Robert L. Jackson's innovative work in electroplating and deposition processes has made a significant impact on technology. His numerous patents reflect his dedication to advancing materials science and engineering.