The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 20, 2007
Filed:
May. 02, 2005
Benjamin A. Bonner, San Jose, CA (US);
Peter Mcreynolds, San Mateo, CA (US);
Gregory E. Menk, Pleasanton, CA (US);
Anand N. Iyer, Santa Clara, CA (US);
Gopalakrishna B. Prabhu, San Jose, CA (US);
Erik S. Rondum, San Ramon, CA (US);
Robert L. Jackson, San Jose, CA (US);
Garlen Leung, San Jose, CA (US);
Benjamin A. Bonner, San Jose, CA (US);
Peter McReynolds, San Mateo, CA (US);
Gregory E. Menk, Pleasanton, CA (US);
Anand N. Iyer, Santa Clara, CA (US);
Gopalakrishna B. Prabhu, San Jose, CA (US);
Erik S. Rondum, San Ramon, CA (US);
Robert L. Jackson, San Jose, CA (US);
Garlen Leung, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A polishing article and method for manufacturing a polishing article for use in a chemical mechanical polishing process is disclosed. The polishing article has a plurality of polishing material tiles separated by grooves formed in or through a polishing material and may be adhesively bound to a base film. The polishing article may include various polygonal tiles and oval shapes formed in the polishing material which allow enhanced slurry retention and ease in rolling from a polishing material supply roll and onto a take-up roll in a web type platen assembly. The polishing article may also include an upper carrier film adapted to minimize delaminating stress placed in an area of the polishing article that is not adapted for polishing. A method and apparatus for manufacturing the various embodiments of the polishing article and a replacement supply roll are also disclosed.