The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 2006
Filed:
Dec. 02, 2002
Evan E. Patton, Portland, OR (US);
Jonathan D. Reid, Sherwood, OR (US);
Jeffrey A. Hawkins, Portland, OR (US);
Dinesh S. Kalakkad, Portland, OR (US);
Evan E. Patton, Portland, OR (US);
Jonathan D. Reid, Sherwood, OR (US);
Jeffrey A. Hawkins, Portland, OR (US);
Dinesh S. Kalakkad, Portland, OR (US);
Novellus Systems, Inc., San Jose, CA (US);
Abstract
Certain mechanisms of a plating apparatus address problems associated with interaction between plating solutions or other processing solutions and the components of the plating apparatus (such as the electrical contacts). For example, a circumferential spray skirt around the interface of a 'cup' and 'cone' in the plating apparatus protects these features during plating. A shield mechanism contacts the cup and/or cone at the periphery of their interface to provide a fluid resistant seal. In some cases, the cone includes an outer circumferential lip that engages a complementary surface of the cup for this purpose. Further, a mechanism is provided for raising and lowering the work piece with the cone in order to allow in situ rinsing of the work piece and/or regions of the cup.