Essingen, Germany

Erich Merz



Average Co-Inventor Count = 5.4

ph-index = 5

Forward Citations = 181(Granted Patents)


Company Filing History:


Years Active: 2001-2014

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11 patents (USPTO):Explore Patents

Title: The Innovative Journey of Erich Merz

Introduction

Erich Merz, a prominent inventor based in Essingen, Germany, has made significant contributions to the field of optical arrangements and projection systems. With a total of 11 patents to his name, Merz exemplifies the spirit of innovation and dedication to engineering excellence.

Latest Patents

Among his recent innovations, Merz has developed a positioning method for an optical arrangement of a projection illumination system. This method involves the use of an actuator to precisely set the position of optical elements. The technique allows for incremental movement based on the distance of these elements from their desired positions. If the distance exceeds a specified threshold, a constant increment size is maintained. Conversely, as the optical element approaches its target position, the increment size diminishes to enhance precision. Additionally, he has patented an imaging device in a projection exposure facility designed for microlithography. This device employs a linear drive with both driven and non-driven subregions capable of manipulating optical elements effectively.

Career Highlights

Erich Merz has had a remarkable career, contributing to various innovations during his tenure at reputable companies such as Carl Zeiss SMT AG and Carl Zeiss SMT GmbH. His work at these institutions has allowed him to refine his skills and drive advancements in optical engineering and microlithography technologies.

Collaborations

Throughout his career, Merz has collaborated with several esteemed professionals, including Thorsten Rassel and Hubert Holderer. These partnerships have not only enriched his projects but have also fostered a conducive environment for groundbreaking discoveries and innovative solutions in the field.

Conclusion

Erich Merz stands out as a visionary inventor whose innovative contributions continue to shape the landscape of optical technology. His dedication to precision and advancement is evident in his patents and collaborative efforts, marking him as a significant figure in the realm of inventions and engineering.

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