The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 03, 2009
Filed:
Dec. 21, 2005
Stephan Back, Langenau, DE;
Wolfgang Hummel, Aalen, DE;
Juergen Fischer, Heidenheim, DE;
Karl-eugen Aubele, Geislingen/Steige, DE;
Erich Merz, Essingen, DE;
Raoul Reiner, Pforzheim, DE;
Klaus Rief, Aalen-Oberalfingen, DE;
Stefan Schoengart, Ulm, DE;
Markus Neumaier, Elchingen, DE;
Baerbel Schwaer, Aalen, DE;
Ulrich Weber, Ulm, DE;
Michael Muehlbeyer, Aalen, DE;
Hubert Holderer, Oberkochen, DE;
Alexander Kohl, Aalen, DE;
Jochen Weber, Grosskuchen, DE;
Johannes Lippert, Buch am Wald, DE;
Thorsten Rassel, Huettlingen, DE;
Stephan Back, Langenau, DE;
Wolfgang Hummel, Aalen, DE;
Juergen Fischer, Heidenheim, DE;
Karl-Eugen Aubele, Geislingen/Steige, DE;
Erich Merz, Essingen, DE;
Raoul Reiner, Pforzheim, DE;
Klaus Rief, Aalen-Oberalfingen, DE;
Stefan Schoengart, Ulm, DE;
Markus Neumaier, Elchingen, DE;
Baerbel Schwaer, Aalen, DE;
Ulrich Weber, Ulm, DE;
Michael Muehlbeyer, Aalen, DE;
Hubert Holderer, Oberkochen, DE;
Alexander Kohl, Aalen, DE;
Jochen Weber, Grosskuchen, DE;
Johannes Lippert, Buch am Wald, DE;
Thorsten Rassel, Huettlingen, DE;
Carl Zeiss SMT AG, Oberkochen, DE;
Abstract
An imaging device in a projection exposure machine for microlithography includes at least one optical element and at least one manipulator, a linear drive for manipulating the position of the optical element. The linear drive has at least one moving element, the moving element having a shearing part and a lifting part. The shearing part is arranged to move the optical element and the lifting part is arranged to move the shearing part. The linear drive has a supporting element which is in contact with and prevents movement of the optical element while the shearing part is moved by the lifting part.