Stefan Schoengart

Title: The Innovations of Stefan Schoengart

Introduction

Stefan Schoengart is a notable inventor based in Ulm, Germany. He has made significant contributions to the field of microlithography, particularly through his innovative imaging devices. With a total of 4 patents to his name, Schoengart's work has had a considerable impact on the industry.

Latest Patents

One of his latest patents involves an imaging device in a projection exposure facility. This device is designed for microlithography and includes at least one optical element along with a manipulator that features a linear drive. The linear drive consists of a driven subregion and a nondriven subregion, which can move relative to each other along a movement axis. These subregions are interconnected temporarily through functional elements that have an active axis and functional elements with an active direction that is approximately parallel to the movement axis.

Career Highlights

Throughout his career, Schoengart has worked with prominent companies such as Carl Zeiss SMT GmbH and Carl Zeiss SMT AG. His experience in these organizations has allowed him to refine his skills and contribute to groundbreaking technologies in the field of optics and microlithography.

Collaborations

Some of his notable coworkers include Wolfgang Hummel and Juergen Fischer. Their collaboration has likely fostered an environment of innovation and creativity, leading to advancements in their respective fields.

Conclusion

Stefan Schoengart's contributions to microlithography through his patents and collaborations highlight his role as a significant inventor in the industry. His work continues to influence the development of advanced imaging technologies.