The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 03, 2010
Filed:
Jun. 20, 2008
Jochen Weber, Grosskuchen, DE;
Erich Merz, Essingen, DE;
Ole Fluegge, Bartholomae, DE;
Kai-uwe Berroth, Heldenfingen, DE;
Cornelia Buehler, Oberkochen, DE;
Markus Hauf, Ulm, DE;
Jochen Weber, Grosskuchen, DE;
Erich Merz, Essingen, DE;
Ole Fluegge, Bartholomae, DE;
Kai-Uwe Berroth, Heldenfingen, DE;
Cornelia Buehler, Oberkochen, DE;
Markus Hauf, Ulm, DE;
Carl Zeiss SMT AG, Oberkochen, DE;
Abstract
In some embodiments, the disclosure relates to an optical assembly that includes an optical element and a structure element. A gap runs between the optical element and the structure element. A sealing element may be present to seal the gap. At least one liquid layer may be arranged between the structure element and/or the optical element, and the sealing element so that a relative displacement of the sealing element with respect to the structure element and/or the optical element is possible in the direction of the layer plane.