The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 04, 2010
Filed:
Nov. 07, 2007
Wolfgang Hummel, Oberkochen, DE;
Jürgen Fischer, Heidenheim, DE;
Karl-eugen Aubele, Geislingen, DE;
Erich Merz, Essingen, DE;
Raoul Reiner, Pforzheim, DE;
Klaus Rief, Aalen-Oberalfingen, DE;
Stefan Schöngart, Ulm, DE;
Markus Neumaier, Elchingen, DE;
Bärbel Trossbach, Aalen, DE;
Ulrich Weber, Ulm, DE;
Michael Mühlbeyer, Aalen, DE;
Hubert Holderer, Königsbronn, DE;
Alexander Kohl, Aalen, DE;
Jochen Weber, Grosskuchen, DE;
Johannes Lippert, Buch am Wald, DE;
Thorsten Rassel, Bü{umlaut over ( )}hlerzell, DE;
Wolfgang Hummel, Oberkochen, DE;
Jürgen Fischer, Heidenheim, DE;
Karl-Eugen Aubele, Geislingen, DE;
Erich Merz, Essingen, DE;
Raoul Reiner, Pforzheim, DE;
Klaus Rief, Aalen-Oberalfingen, DE;
Stefan Schöngart, Ulm, DE;
Markus Neumaier, Elchingen, DE;
Bärbel Trossbach, Aalen, DE;
Ulrich Weber, Ulm, DE;
Michael Mühlbeyer, Aalen, DE;
Hubert Holderer, Königsbronn, DE;
Alexander Kohl, Aalen, DE;
Jochen Weber, Grosskuchen, DE;
Johannes Lippert, Buch am Wald, DE;
Thorsten Rassel, Bü{umlaut over ( )}hlerzell, DE;
Carl Zeiss SMT AG, Oberkochen, DE;
Abstract
An imaging device in a projection exposure machine for microlithography has at least one optical element and at least one manipulator, having a linear drive, for manipulating the position of the optical element. The linear drive has a driven subregion and a nondriven subregion, which are movable relative to one another in the direction of a movement axis. The subregions are interconnected at least temporarily via functional elements with an active axis and via functional elements with an active direction at least approximately parallel to the movement axis.