Company Filing History:
Years Active: 2005-2010
Title: Innovations by Inventor Michael Mühlbeyer
Introduction
Michael Mühlbeyer, an accomplished inventor based in Aalen, Germany, has made significant contributions to the field of microlithography. With a total of four patents to his name, Mühlbeyer is recognized for his innovative designs and technical expertise, particularly in optical systems and their functionalities.
Latest Patents
Among his most notable inventions is an imaging device in a projection exposure machine specifically designed for microlithography. This imaging device integrates at least one optical element and features a manipulator with a linear drive, allowing for precise adjustments in the positioning of the optical component. Notably, the linear drive possesses both a driven subregion and a non-driven subregion, which can move relative to one another along a defined movement axis. These subregions interchange through functional elements that utilize an active axis for enhanced performance.
Another significant patent of Mühlbeyer involves an optical assembly that comprises at least one optical element that is adjustable in at least two degrees of freedom. This assembly incorporates at least one actuator responsible for the modifications and at least one sensor for monitoring the positional adjustments of the optical element. A distinguishing feature of this invention is the placement of the sensor, which is positioned diagonally opposite the actuator, promoting effective synchronization between sensing and actuation.
Career Highlights
Michael Mühlbeyer works at Carl Zeiss SMT AG, a leading company in the field of optical and industrial solutions. His career at this renowned organization has been marked by a focus on precision engineering and innovative optical technologies, which has led to numerous advancements in the industry.
Collaborations
Throughout his career, Mühlbeyer has collaborated with eminent colleagues, including Johannes Lippert and Hans-Jürgen Mann. These partnerships have not only enriched his work experiences but have also contributed to the development of groundbreaking technologies in microlithography and optical systems.
Conclusion
Michael Mühlbeyer's work exemplifies the spirit of innovation within the realm of optical engineering. His patents play a crucial role in advancing technology in microlithography, showcasing his dedication to improving optical devices. As a prominent figure at Carl Zeiss SMT AG, Mühlbeyer's contributions continue to impact the industry positively, paving the way for future advancements.