The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 18, 2005
Filed:
Sep. 19, 2001
Frank Melzer, Utzmemmingen, DE;
Michael Mühlbeyer, Aalen, DE;
Bernhard Gellrich, Aalen, DE;
Franz Sorg, Aalen, DE;
Stefan Xalter, Oberkochen, DE;
Thomas Ittner, Aalen, DE;
Frank Melzer, Utzmemmingen, DE;
Michael Mühlbeyer, Aalen, DE;
Bernhard Gellrich, Aalen, DE;
Franz Sorg, Aalen, DE;
Stefan Xalter, Oberkochen, DE;
Thomas Ittner, Aalen, DE;
Carl Zeiss SMT AG, , DE;
Abstract
In a system for specific deformation of optical elements in an imaging device, in particular in a projection exposure machine having a projection lens for micro-lithography, for the purpose of eliminating image errors or for active adjustment, piezoelectric elements are applied as actuators in the form of thin plates, films or layers to surfaces to be deformed, or integrated into them. In conjunction with an adaptronic servo loop having sensors, forces and/or moments are exerted on the optical elements for their specific deformation by means of a controlled activation of the piezoelectric elements as actuators.