Aalen, Germany

Thomas Ittner

USPTO Granted Patents = 13 


Average Co-Inventor Count = 5.7

ph-index = 3

Forward Citations = 47(Granted Patents)


Company Filing History:


Years Active: 2004-2017

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13 patents (USPTO):

Title: Thomas Ittner: Innovator in Optical Imaging Technology

Introduction

Thomas Ittner is a prominent inventor based in Aalen, Germany, known for his significant contributions to optical imaging technology. With a total of 13 patents to his name, Ittner has made remarkable advancements in the field, particularly in microlithography.

Latest Patents

One of Ittner's latest patents is an optical imaging device with thermal attenuation. This device is designed for use in microlithography and includes a mask device for receiving a mask with a projection pattern, a projection device with an optical element group, and a substrate device for receiving a substrate. The optical element group is specifically adapted to project the projection pattern onto the substrate, incorporating a plurality of optical elements with an immersion element. During operation, the immersion zone is located between the immersion element and the substrate, temporarily filled with an immersion medium. A thermal attenuation device is also included, which reduces fluctuations in the temperature distribution of the immersion element caused by the immersion medium. Another notable patent is a replacement apparatus for an optical element, which is mounted between two adjacent optical elements in a lithography objective. This apparatus features a holder for the optical element to be replaced, allowing it to be moved into the lithography objective through a lateral opening in the housing.

Career Highlights

Throughout his career, Thomas Ittner has worked with esteemed companies such as Carl Zeiss SMT GmbH and Carl Zeiss SMT AG. His work in these organizations has significantly influenced the development of advanced optical technologies.

Collaborations

Ittner has collaborated with notable colleagues, including Jens Kugler and Franz Sorg, contributing to various projects that have furthered the field of optical imaging.

Conclusion

Thomas Ittner's innovative work in optical imaging technology has established him as a key figure in the industry. His patents and collaborations reflect his commitment to advancing technology in microlithography and beyond.

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