The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 02, 2014
Filed:
Jun. 18, 2013
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Jens Kugler, Aalen, DE;
Franz Sorg, Aalen, DE;
Andreas Wurmbrand, Aalen, DE;
Thomas Schletterer, Stadtroda, DE;
Thomas Ittner, Aalen, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 7/02 (2006.01); G03F 7/20 (2006.01); G02B 7/00 (2006.01); G02B 13/14 (2006.01); G02B 7/14 (2006.01);
U.S. Cl.
CPC ...
G02B 7/02 (2013.01); G03F 7/70825 (2013.01); G02B 7/00 (2013.01); G03F 7/70258 (2013.01); G02B 13/14 (2013.01); G02B 7/14 (2013.01);
Abstract
A replacement apparatus for an optical element mounted between two adjacent optical elements in a lithography objective has a holder for the optical element to be replaced, which holder can be moved into the lithography objective through a lateral opening in a housing of the same.