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For the Inventor, By the Inventor

Union City, CA, United States of America

Dengliang Yang

USPTO Granted Patents = 14 

Average Co-Inventor Count = 4.8

ph-index = 4

Forward Citations = 178(Granted Patents)


Company Filing History:

goldMedal12 out of 3,768 
 
Lam Research Corporation
 patents
silverMedal1 out of 15,458 
 
University of California
 patents
bronzeMedal1 out of 993 
 
Novellus Systems Incorporated
 patents

Years Active: 2013-2025

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14 patents (USPTO):
1. 12272571 - Systems and methods for metastable activated radical selective strip and etch using dual plenum showerhead (2025-04-08),
2. 12272570 - Systems and methods for metastable activated radical selective strip and etch using dual plenum showerhead (2025-04-08),
3. 12211709 - Systems and methods for metastable activated radical selective strip and etch using dual plenum showerhead (2025-01-28),
4. 11694911 - Systems and methods for metastable activated radical selective strip and etch using dual plenum showerhead (2023-07-04),
5. 11469079 - Ultrahigh selective nitride etch to form FinFET devices (2022-10-11),
6. 10727089 - Systems and methods for selectively etching film (2020-07-28),
7. 10283615 - Ultrahigh selective polysilicon etch with high throughput (2019-05-07),
8. 10267728 - Systems and methods for detecting oxygen in-situ in a substrate area of a substrate processing system (2019-04-23),
9. 10192751 - Systems and methods for ultrahigh selective nitride etch (2019-01-29),
10. 10147588 - System and method for increasing electron density levels in a plasma of a substrate processing system (2018-12-04),
11. 9837286 - Systems and methods for selectively etching tungsten in a downstream reactor (2017-12-05),
12. 9640409 - Self-limited planarization of hardmask (2017-05-02),
13. 9515156 - Air gap spacer integration for improved fin device performance (2016-12-06),
14. 8384409 - Ultra-thin organic TFT chemical sensor, making thereof, and sensing method (2013-02-26),

Title: Innovations of Dengliang Yang

Introduction

Dengliang Yang is a prominent inventor based in Union City, CA (US). He has made significant contributions to the field of substrate processing systems, holding a total of 14 patents. His work focuses on advanced gas distribution devices and methods that enhance processing efficiency.

Latest Patents

One of his latest patents is titled "Systems and methods for metastable activated radical selective strip and etch using dual plenum showerhead." This patent presents several designs of a gas distribution device for a substrate processing system, which includes a dual plenum showerhead. Additionally, it provides designs for a light blocking structure used with the showerheads, further improving the functionality of the system.

Career Highlights

Dengliang Yang has worked with notable organizations such as Lam Research Corporation and the University of California. His experience in these institutions has allowed him to develop innovative solutions that address complex challenges in substrate processing.

Collaborations

Some of his notable coworkers include Joon Hong Park and Haoquan Fang. Their collaborative efforts have contributed to the advancement of technologies in their respective fields.

Conclusion

Dengliang Yang's innovative work and numerous patents reflect his dedication to advancing substrate processing technologies. His contributions continue to influence the industry and inspire future innovations.

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