This inventor holds 15 USPTO granted patents and 3 published patent applications. Top assignees: Lam Research Corporation, Novellus Systems Incorporated, University of California. Active years: 2013-2026.
Company Filing History:
13 out of 3,936 
1 out of 993 
1 out of 15,988 
Years Active: 2013-2026
Title: Innovations of Dengliang Yang
Introduction
Dengliang Yang is a prominent inventor based in Union City, CA (US). He has made significant contributions to the field of substrate processing systems, holding a total of 15 patents. His work focuses on advanced gas distribution devices and methods that enhance processing efficiency.
Latest Patents
One of his latest patents is titled "Systems and methods for metastable activated radical selective strip and etch using dual plenum showerhead." This patent presents several designs of a gas distribution device for a substrate processing system, which includes a dual plenum showerhead. Additionally, it provides designs for a light blocking structure used with the showerheads, further improving the functionality of the system.
Career Highlights
Dengliang Yang has worked with notable organizations such as Lam Research Corporation and the University of California. His experience in these institutions has allowed him to develop innovative solutions that address complex challenges in substrate processing.
Collaborations
Some of his notable coworkers include Joon Hong Park and Haoquan Fang. Their collaborative efforts have contributed to the advancement of technologies in their respective fields.
Conclusion
Dengliang Yang's innovative work and numerous patents reflect his dedication to advancing substrate processing technologies. His contributions continue to influence the industry and inspire future innovations.