Johor, Malaysia

Chun Hui Low


Average Co-Inventor Count = 5.2

ph-index = 6

Forward Citations = 177(Granted Patents)


Location History:

  • Misia, MY (2001 - 2002)
  • Johor, MY (2001 - 2010)
  • Singapore, SG (2001 - 2013)

Company Filing History:


Years Active: 2001-2013

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11 patents (USPTO):

Title: Innovations of Chun Hui Low

Introduction

Chun Hui Low is a notable inventor based in Johor, Malaysia, recognized for his contributions to semiconductor technology. With a total of 11 patents to his name, he has made significant advancements in the field of integrated circuits and dielectric materials.

Latest Patents

One of his latest patents is titled "Method of forming high-k dielectric stop layer for contact hole opening." This invention involves a composite etch stop layer that includes primary and secondary stop layers, which are utilized to form contacts in a dielectric layer to connect with regions in a substrate. The secondary etch stop layer incorporates a high-k dielectric material, allowing for high etch selectivity during contact formation. The removal of the secondary stop layer is achieved with high selectivity to the underlying materials. Another significant patent is focused on defining the critical dimension for trenches and vias. This patent describes test structures that include test trenches used to establish the critical dimensions of trenches in a via level of an integrated circuit, ensuring uniform depth. The trenches are strategically formed at the periphery of the integrated circuit to function as guard rings.

Career Highlights

Chun Hui Low has had a distinguished career, working with prominent companies in the semiconductor industry. He has been associated with Chartered Semiconductor Manufacturing Ltd and Globalfoundries Singapore Pte. Ltd., where he has contributed to various innovative projects and advancements in technology.

Collaborations

Throughout his career, Chun Hui Low has collaborated with talented individuals, including Chong Wee Lim and Soh Yun Siah, who have played significant roles in his professional journey.

Conclusion

Chun Hui Low's innovative work in semiconductor technology and his numerous patents highlight his expertise and dedication to advancing the field. His contributions continue to influence the development of integrated circuits and dielectric materials, showcasing the importance of innovation in technology.

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