The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 23, 2012
Filed:
Oct. 29, 2007
Applicants:
Hai Cong, Singapore, SG;
Yan Shan LI, Toronto, CA;
Chun Hui Low, Singapore, SG;
Yelehanka Ramachandramurthy Pradeep, Singapore, SG;
Liang Choo Hsia, Singapore, SG;
Inventors:
Hai Cong, Singapore, SG;
Yan Shan Li, Toronto, CA;
Chun Hui Low, Singapore, SG;
Yelehanka Ramachandramurthy Pradeep, Singapore, SG;
Liang Choo Hsia, Singapore, SG;
Assignee:
GLOBALFOUNDRIES Singapore Pte. Ltd., Singapore, SG;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 31/26 (2006.01); H01L 21/66 (2006.01); H01L 23/58 (2006.01); H01L 29/10 (2006.01);
U.S. Cl.
CPC ...
Abstract
Test structures including test trenches are used to define critical dimension of trenches in a via level of an integrated circuit to produce substantially the same depth. The trenches are formed at the periphery of the IC to serve as guard rings.