An-Chun Tu

Title: Inventor An-Chun Tu: Innovations in Semiconductor Technology

Introduction

An-Chun Tu, an accomplished inventor based in Taipei, Taiwan, has made significant contributions to the field of semiconductor technology. With a remarkable portfolio of 16 patents, his work has been influential in advancing methods and structures that enhance the performance and reliability of semiconductor devices.

Latest Patents

Among An-Chun Tu's latest patents is a method for semiconductor test structures involving a resistive device. This innovative method includes a substrate with an active region that is separated from a gate electrode by a dielectric material. The approach encompasses performing several processes to create the resistive device, measuring resistance between the electrical contacts, and correlating the measured resistance with variations in one or more of these processes.

Another notable patent is his method of forming a nitrogen-containing oxide film. This process includes exposing a substrate to a sequence of gas pulses—first, either an oxygen-containing gas or a metal-containing gas; second, the remaining gas to form an oxide film; and third, applying a nitrogen-containing plasma to create a nitrogen-containing oxide film with a nitrogen concentration ranging between 0.1 and 3 atomic percent.

Career Highlights

An-Chun Tu's career has been marked by significant roles at leading companies in the semiconductor industry. He has contributed his expertise to Taiwan Semiconductor Manufacturing Company Limited and Winbond Electronics Corporation. These positions have allowed him to be at the forefront of semiconductor innovation, leveraging his skills to influence the industry's direction.

Collaborations

Throughout his career, An-Chun Tu has collaborated with notable professionals in the field, including Chen-Ming Huang and Chih-Jen Wu. These partnerships have fostered a creative environment for problem-solving and innovation, leading to advancements in semiconductor technologies.

Conclusion

An-Chun Tu stands out as a notable inventor whose innovative work in semiconductor technology continues to impact the industry. His patents reflect a deep understanding of complex systems and an ability to drive technological advancements. As the field of semiconductor technology evolves, the contributions of inventors like An-Chun Tu remain crucial for future innovations.