The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 24, 2013
Filed:
Feb. 03, 2009
An-chun Tu, Taipei, TW;
Chen-ming Huang, Hsin-Chu, TW;
An-Chun Tu, Taipei, TW;
Chen-Ming Huang, Hsin-Chu, TW;
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Abstract
A method for fabricating an integrated circuit providing an enlarged contact process window while reducing device size is disclosed. The method comprises providing a substrate including a first region and a second region, the first and second regions having one or more gate structures including a dummy gate layer; removing the dummy gate layer from at least one of the one or more gate structures in the first and second regions to form one or more trenches in the first and second regions; filling the one or more trenches in the first and second regions with a conductive layer; selectively etching back the conductive layer of the one or more gate structures in the second region of the substrate; forming a protective layer over the etched back conductive layer of the one or more gate structures in the second region; and forming one or more contact openings in the first and second regions.