Alan Jeffrey Miller

Title: Innovations by Alan Jeffrey Miller in Semiconductor Technology

Introduction

Alan Jeffrey Miller, based in Moraga, CA, is an accomplished inventor with a remarkable portfolio of 20 patents. His innovations primarily focus on advancing semiconductor processes, showcasing his expertise and contribution to the field.

Latest Patents

Among his latest patents, Miller developed "Systems for removing and replacing consumable parts from a semiconductor process module in situ." This invention involves a sophisticated cluster tool assembly featuring a vacuum transfer module and a process module. The design integrates an isolation valve and a replacement station, which is equipped with an exchange handler and a part buffer. The innovative lift mechanism allows for the seamless removal and replacement of consumable parts while maintaining a vacuum state, ensuring efficiency and precision in semiconductor manufacturing.

Another significant patent is titled "Methods for detecting endpoint for through-silicon via reveal applications." This technology enhances wafer processing through a plasma processing chamber that utilizes a camera, coupled with an image processor. The system’s pattern recognition logic detects endpoint matches by comparing captured images to reference patterns, allowing for real-time adjustments to etching operations. These advancements reflect Miller's commitment to improving semiconductor processing capabilities.

Career Highlights

Miller's impressive career boasts significant contributions while working at Lam Research Corporation, a leader in semiconductor equipment manufacturing. His role at Lam Research has facilitated the development of critical technologies that address the evolving demands of the semiconductor industry.

Collaborations

Throughout his career, Miller has collaborated with notable colleagues such as Vahid Vahedi and Frank Lin. These partnerships have enabled the exchange of ideas and driven innovative solutions in semiconductor technology, further amplifying his impact in the field.

Conclusion

Alan Jeffrey Miller continues to be a driving force in semiconductor innovations with his extensive patent portfolio and collaborative efforts. His work not only advances technology but also sets a foundation for future developments in the industry, ensuring that the world of semiconductors evolves with cutting-edge solutions.