The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 19, 2026
Filed:
Jun. 10, 2021
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventors:
Lai Wei, Fremont, CA (US);
Ji Soo Kim, Pleasanton, CA (US);
Alan Jeffrey Miller, Moraga, CA (US);
William Thie, Fremont, CA (US);
Frank Yun Lin, Fremont, CA (US);
Jun Hee Hee Han, San Ramon, CA (US);
Jie Liu, Union City, CA (US);
Conan Chiang, Cupertino, CA (US);
Michael John Martin, Union City, CA (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); H10P 50/24 (2026.01); H10P 72/00 (2026.01); H10P 72/76 (2026.01);
U.S. Cl.
CPC ...
H10P 72/7606 (2026.01); H01J 37/32642 (2013.01); H01J 37/32715 (2013.01); H10P 50/242 (2026.01); H10P 72/0421 (2026.01); H10P 72/7611 (2026.01); H01J 2237/334 (2013.01);
Abstract
In some examples, a flat Bottom Shadow Ring (fBSR) is provided for processing a substrate in a processing chamber. An example fBSR comprises an overhang for covering an edge of the substrate in the processing chamber. The overhang includes a fiat zone that extends radially outward over the outer edge of the substrate.