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Tokyo Electron Saga Limited

USPTO Granted Patents = 13

Forward Citations = 242

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21 inventors (with patents filed for the assignee):

Yuuji Kamikawa (5 out of 12 patents)

Mitsuo Nishi (5 out of 11 patents)

Hirofumi Shiraishi (5 out of 6 patents)

4. Hiroshi Tanaka (5 out of 54 patents)

5. Takami Satoh (4 out of 20 patents)

6. Koji Harada (4 out of 17 patents)

7. Noriyuki Anai (4 out of 27 patents)

8. Sinichiro Izumi (4 out of 4 patents)

9. Takayuki Tomoeda (4 out of 11 patents)

10. Shinya Murakami (4 out of 5 patents)

11. Yuji Kamikawa (2 out of 84 patents)

12. Yoshiyuki Honda (2 out of 7 patents)

13. Osamu Tanaka (1 out of 3 patents)

14. Shori Mokuo (1 out of 13 patents)

15. Takanori Miyazaki (1 out of 13 patents)

13 patents: Sort by Forward Citations

1. 5887604 - Washing apparatus, and washing method (1999-03-30),

2. 5782990 - Method for washing objects (1998-07-21),

3. 5671764 - Washing apparatus, and washing method (1997-09-30),

4. 5488964 - Washing apparatus, and washing method (1996-02-06),

5. 5339539 - Spindrier (1994-08-23),

6. 5327921 - Processing vessel for a wafer washing system (1994-07-12),

7. 5311893 - Cleaning apparatus (1994-05-17),

8. 5301700 - Washing system (1994-04-12),

9. 5299584 - Cleaning device (1994-04-05),

10. 5266812 - Substrate detector with light emitting and receiving elements arranged (1993-11-30),

11. 5265632 - Cleaning apparatus (1993-11-30),

12. 5253663 - Transfer apparatus (1993-10-19),

13. 5248022 - Driving device having sealing mechanism (1993-09-28),

Tokyo Electron Saga Limited is a leading manufacturer of semiconductor production equipment. With a focus on innovation and quality, the company offers a wide range of products and services to meet the needs of the semiconductor industry. With a commitment to customer satisfaction, Tokyo Electron Saga Limited continues to grow and expand its global footprint.

This text is generated by artificial intelligence and may not be accurate.

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USPTO Data Jan 1 1976 - Sep 15 2026

13 Patents

#3 in Tosu

#3,741 in Japan

#44,914 in the World

Tokyo Electron Saga Limited

Forward Citations = 242

21 inventors:

Yuuji Kamikawa (5 out of 12 patents)

Mitsuo Nishi (5 out of 11 patents)

Hirofumi Shiraishi (5 out of 6 patents)

4. Hiroshi Tanaka (5 out of 54 patents)

5. Takami Satoh (4 out of 20 patents)

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