The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 21, 1998
Filed:
Jan. 27, 1997
Shinya Murakami, Kumamoto-ken, JP;
Yuuji Kamikawa, Uto, JP;
Sinichiro Izumi, Kumamoto, JP;
Noriyuki Anai, Kumamoto-ken, JP;
Takami Satoh, Kumamoto-ken, JP;
Hirofumi Shiraishi, Kurume, JP;
Koji Harada, Kumamoto-ken, JP;
Takayuki Tomoeda, Kumamoto-ken, JP;
Hiroshi Tanaka, Kurume, JP;
Tokyo Electron Limited, Tokyo, JP;
Tokyo Electron Saga Limited, Tosu, JP;
Abstract
A washing method for washing objects includes the steps of supplying a washing liquid to a washing vessel and immersing objects in the washing liquid contained in the washing vessel. The method also includes the steps of discharging the liquid at least once from the washing vessel, and starting to apply the washing liquid to the objects when the objects are partly exposed to air as the liquid is discharged from the washing vessel. The washing liquid application is continued during exposure of the objects to the air to prevent the surface of the objects from being dried and stained.