The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 05, 1994
Filed:
Apr. 23, 1992
Takanori Miyazaki, Kumamoto, JP;
Sinitirou Izumi, Kumamoto, JP;
Tokyo Electron Limited, Tokyo, JP;
Tokyo Electron Saga Limited, Tosu, JP;
Abstract
A cleaning device comprises at least one cleaning tub containing a cleaning liquid, a chamber housing the cleaning tub, a mechanism for taking an article to be cleaned in/out of the cleaning liquid in the cleaning tub, and a shutter for shutting the inside of the chamber from the outside thereof. The shutter opens when a cleaned material is conveyed in/out of the chamber, thereby passing the cleaned material there through. A clean air supplying unit for forming downflow of clean air around the cleaning tub is provided on the upper portion of the chamber. A exhausting unit for sucking the clean air passing around the cleaning tub and exhausting the air out of the chamber is provided on the lower portion of the chamber.