The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 06, 1996
Filed:
May. 07, 1992
Shinya Murakami, Kumamoto, JP;
Yuji Kamikawa, Uto, JP;
Sinichiro Izumi, Kumamoto, JP;
Noriyuki Anai, Kumamoto, JP;
Takami Satoh, Kumamoto, JP;
Hirofumi Shiraishi, Kurume, JP;
Koji Harada, Kumamoto, JP;
Takayuki Tomoeda, Kumamoto, JP;
Hiroshi Tanaka, Kurume, JP;
Tokyo Electron Limited, Tokyo, JP;
Tokyo Electron Saga Limited, Tosu, JP;
Abstract
Disclosed herein is a washing apparatus comprising a washing chamber, an opening/closing mechanism, and a nozzle. The chamber has an opening and is designed for washing the objects transported from outside through the opening. The opening/closing mechanism is designed to open and close the opening of the washing chamber. The nozzle is used to wash the opening/closing mechanism. The apparatus further comprises a washing vessel filled with a washing liquid, for washing the objects, and also a nozzle for applying a washing liquid to the objects located in the washing vessel when the objects are partly exposed as the washing liquid is discharged from the washing vessel.