Forward Citations = 2

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8 inventors (with patents filed for the assignee):

Sarpangala Hariharakeshava Hegde (9 out of 9 patents)

Vincent Lee (6 out of 9 patents)

Wei-Hua Hsiao (4 out of 5 patents)

4. Armin Baur (3 out of 3 patents)

5. Russell Westerman (2 out of 49 patents)

6. Peter Goglia (1 out of 4 patents)

7. Jerome Michael Buckley (1 out of 1 patent)

8. Joseph Barraco (1 out of 2 patents)

9 patents: Sort by Forward Citations

1. 12671062 - Virtual shutter in ion beam system (2026-06-30),

2. 12368117 - Electrostatic discharge prevention in ion beam system (2025-07-22),

3. 12176178 - Scanning ion beam deposition and etch (2024-12-24),

4. 11901167 - Ion beam deposition target life enhancement (2024-02-13),

5. 11784025 - Integral sweep in ion beam system (2023-10-10),

6. 11646171 - Scanning ion beam etch (2023-05-09),

7. 11227741 - Scanning ion beam etch (2022-01-18),

8. 9865436 - Powered anode for ion source for DLC and reactive processes (2018-01-09),

9. 9863036 - Wafer stage for symmetric wafer processing (2018-01-09),

Company Overview

Plasma-therm Nes LLC is a leading manufacturer of advanced plasma etch and deposition equipment for the global semiconductor industry. With over 30 years of experience, our innovative technologies deliver precision solutions for plasma processing applications in the microelectronics, MEMS, and nanotechnology sectors. We are committed to providing high-quality, reliable products and exceptional customer service to our clients worldwide.

Profile summary synthesized from public USPTO records and patent filings.

Company Badge

USPTO Data Jan 1 1976 - Oct 13 2026

9 Patents

#27 in St. Petersburg, FL

#973 in Florida

#32,588 in US

St. Petersburg, FL, United States of America

Plasma-Therm Nes LLC

Forward Citations = 2

8 inventors:

Sarpangala Hariharakeshava Hegde (9 out of 9 patents)

Vincent Lee (6 out of 9 patents)

Wei-Hua Hsiao (4 out of 5 patents)

4. Armin Baur (3 out of 3 patents)

5. Russell Westerman (2 out of 49 patents)

IDiyas Innovation Intelligence. (2026). Company Patent Portfolio: Plasma-Therm Nes LLC. Retrieved from https://idiyas.com/company/plasma-therm-nes

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]