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8 inventors (with patents filed for the assignee):

Sarpangala Hariharakeshava Hegde (8 out of 8 patents)

Vincent Lee (6 out of 9 patents)

Wei-Hua Hsiao (3 out of 3 patents)

4. Armin Baur (2 out of 2 patents)

5. Peter Goglia (1 out of 3 patents)

6. Russell Westerman (1 out of 48 patents)

7. Jerome Michael Buckley (1 out of 1 patent)

8. Joseph Barraco (1 out of 1 patent)

8 patents: Sort by Forward Citations

1. 12368117 - Electrostatic discharge prevention in ion beam system (2025-07-22),

2. 12176178 - Scanning ion beam deposition and etch (2024-12-24),

3. 11901167 - Ion beam deposition target life enhancement (2024-02-13),

4. 11784025 - Integral sweep in ion beam system (2023-10-10),

5. 11646171 - Scanning ion beam etch (2023-05-09),

6. 11227741 - Scanning ion beam etch (2022-01-18),

7. 9865436 - Powered anode for ion source for DLC and reactive processes (2018-01-09),

8. 9863036 - Wafer stage for symmetric wafer processing (2018-01-09),

Plasma-therm Nes LLC is a leading manufacturer of advanced plasma etch and deposition equipment for the global semiconductor industry. With over 30 years of experience, our innovative technologies deliver precision solutions for plasma processing applications in the microelectronics, MEMS, and nanotechnology sectors. We are committed to providing high-quality, reliable products and exceptional customer service to our clients worldwide.

This text is generated by artificial intelligence and may not be accurate.

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USPTO Data Jan 1 1976 - Dec 23 2025

8 Patents

#32 in St. Petersburg, FL

#1,067 in Florida

#34,864 in US

St. Petersburg, FL, United States of America

Plasma-therm Nes LLC