Company Filing History:
Years Active: 2023-2025
Title: Armin Baur: Innovator in Ion Beam Technology
Introduction
Armin Baur is a notable inventor based in Largo, FL (US), recognized for his contributions to ion beam technology. He holds 2 patents that focus on enhancing the efficiency and safety of ion beam systems. His work is pivotal in preventing electrostatic damage during substrate processing, which is crucial in various technological applications.
Latest Patents
One of Armin Baur's latest patents is titled "Electrostatic discharge prevention in ion beam system." This patent outlines methods for processing a substrate within a shutterless ion beam etching (IBE) system or shutterless ion assist ion beam deposition (IBD) system while preventing electrostatic damage to the substrate. The innovation involves reducing the ion energy to less than 20 electron volts at critical stages of the IBE and IBD processes, ensuring the safety of the devices on the substrate's surface.
Another significant patent is "Integral sweep in ion beam system." This patent describes a method for achieving an integral number of sweeps within an ion beam. It details how a substrate with a fiducial is placed on a wafer stage, which is then rotated to expose the substrate to an energetic particle beam. The exposure is carefully controlled to ensure that the number of sweeps in both clockwise and counterclockwise directions is equal, optimizing the processing efficiency.
Career Highlights
Armin Baur is currently employed at Plasma-Therm NES LLC, where he continues to innovate in the field of ion beam technology. His work at this company has allowed him to develop advanced techniques that enhance the performance of ion beam systems.
Collaborations
Armin collaborates with talented individuals such as Sarpangala Hariharakeshava Hegde and Wei-Hua Hsiao. These collaborations contribute to the advancement of technology in their field, fostering innovation and development.
Conclusion
Armin Baur's contributions to ion beam technology through his patents and work at Plasma-Therm NES LLC highlight his role as a significant inventor in this specialized area. His innovations are essential for improving the safety and efficiency of substrate processing in various applications.