Fremont, CA, United States of America

Sarpangala Hariharakeshava Hegde

USPTO Granted Patents = 8 

Average Co-Inventor Count = 2.6

ph-index = 1

Forward Citations = 1(Granted Patents)


Company Filing History:


Years Active: 2018-2025

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8 patents (USPTO):Explore Patents

Title: Innovations by Sarpangala Hariharakeshava Hegde: A Pioneer in Ion Beam Technology

Introduction: Sarpangala Hariharakeshava Hegde, based in Fremont, CA, is an esteemed inventor with a remarkable portfolio of seven patents. His contributions to ion beam technology are instrumental, showcasing his commitment to advancing the field of material deposition and etching processes.

Latest Patents: Among his latest innovations, Hegde holds a patent for "Scanning Ion Beam Deposition and Etch." This patent details a groundbreaking method to adjust the asymmetric velocity of a scan during the deposition or etch processes. This adjustment corrects inconsistencies between the inboard and outboard sides of device structures on a wafer while maintaining overall uniformity. Another significant patent he has developed is called "Ion Beam Deposition Target Life Enhancement." This technology significantly improves target utilization within a sputtering system by directing an ion beam at various locations on multiple targets, thus enhancing the efficiency of the sputtering process.

Career Highlights: Hegde's professional career is marked by his tenure at Plasma-Therm NES LLC, where he applies his extensive expertise in ion beam technology to drive innovation. His remarkable ability to innovate in complex technical fields has earned him a respected reputation among peers and industry leaders.

Collaborations: Hegde collaborates with notable professionals in the field, including his coworkers Vincent Lee and Wei-Hua Hsiao. Together, they work to push the boundaries of technology and develop new methodologies that enhance production processes in nanotechnology and semiconductor manufacturing.

Conclusion: Sarpangala Hariharakeshava Hegde stands out as a notable inventor whose work in ion beam technology is paving the way for advancements in manufacturing techniques. His patents not only illustrate his inventive prowess but also contribute significantly to the efficiency and effectiveness of modern technologies in the semiconductor industry.

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