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Dornstadt, Germany

Mattson Thermal Products Gmbh

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USPTO Granted Patents = 12

% Expired Patents = 16.7

Forward Citations = 94

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27 inventors (with patents filed for the assignee):

Markus Hauf (4 out of 62 patents)

Georg Roters (3 out of 4 patents)

Christoph Striebel (2 out of 4 patents)

4. Manfred Falter (2 out of 3 patents)

5. Christoph Merkl (2 out of 4 patents)

6. Rahul Sharangpani (1 out of 120 patents)

7. Rolf Bremensdorfer (1 out of 25 patents)

8. Wilfried Lerch (1 out of 13 patents)

9. Yao Zhi Hu (1 out of 14 patents)

10. Sing-Pin Tay (1 out of 7 patents)

11. Jens-Uwe Sachse (1 out of 12 patents)

12. Steffen Frigge (1 out of 2 patents)

13. Sing Pin Tay (1 out of 6 patents)

14. Regina Hayn (1 out of 2 patents)

15. Erwin Schoer (1 out of 2 patents)

12 patents: Sort by Forward Citations

1. 8450652 - Apparatus for thermally treating semiconductor substrates (2013-05-28),

2. 7412299 - Process for determining the temperature of a semiconductor wafer in a rapid heating unit (2008-08-12),

3. 7169717 - Method of producing a calibration wafer (2007-01-30),

4. 7151060 - Device and method for thermally treating semiconductor wafers (2006-12-19),

5. 7144826 - Method and apparatus for the production of process gas that includes water vapor and hydrogen formed by burning oxygen in a hydrogen-rich environment (2006-12-05),

6. 7144747 - Method for thermally treating a substrate that comprises several layers (2006-12-05),

7. 7098157 - Method and apparatus for thermally treating disk-shaped substrates (2006-08-29),

8. 7056389 - Method and device for thermal treatment of substrates (2006-06-06),

9. 6965093 - Device for thermally treating substrates (2005-11-15),

10. 6809011 - Adjusting of defect profiles in crystal or crystalline-like structures (2004-10-26),

11. 6775471 - Method and device for thermally treating objects (2004-08-10),

12. 6303524 - High temperature short time curing of low dielectric constant materials using rapid thermal processing techniques (2001-10-16),

Company Overview

Mattson Thermal Products GmbH, based in Dornstadt, Germany, specializes in advanced thermal management solutions for various industries. The company focuses on the development and manufacturing of innovative heating and cooling systems, catering to sectors such as semiconductor manufacturing, automotive, and renewable energy. With a commitment to enhancing energy efficiency and performance, Mattson Thermal Products leverages cutting-edge technology to deliver reliable and effective thermal solutions tailored to meet the evolving needs of its clients.

Profile summary synthesized from public USPTO records and patent filings.

Company Badge

USPTO Data Jan 1 1976 - Oct 20 2026

12 Patents

#1 in Dornstadt

#3,300 in Germany

#48,209 in the World

Dornstadt, Germany

Mattson Thermal Products Gmbh

Forward Citations = 94

27 inventors:

Markus Hauf (4 out of 62 patents)

Georg Roters (3 out of 4 patents)

Christoph Striebel (2 out of 4 patents)

4. Manfred Falter (2 out of 3 patents)

5. Christoph Merkl (2 out of 4 patents)

IDiyas Innovation Intelligence. (2026). Company Patent Portfolio: Mattson Thermal Products Gmbh. Retrieved from https://idiyas.com/company/mattson-thermal-products

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]

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