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Dornstadt, Germany

Mattson Thermal Products Gmbh

USPTO Granted Patents = 12

% Expired Patents = 16.7

Forward Citations = 94

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27 inventors (with patents filed for the assignee):

Markus Hauf (4 out of 62 patents)

Georg Roters (3 out of 4 patents)

Christoph Striebel (2 out of 4 patents)

4. Manfred Falter (2 out of 3 patents)

5. Christoph Merkl (2 out of 4 patents)

6. Rahul Sharangpani (1 out of 118 patents)

7. Rolf Bremensdorfer (1 out of 25 patents)

8. Wilfried Lerch (1 out of 13 patents)

9. Yao Zhi Hu (1 out of 14 patents)

10. Sing-Pin Tay (1 out of 7 patents)

11. Jens-Uwe Sachse (1 out of 12 patents)

12. Steffen Frigge (1 out of 2 patents)

13. Sing Pin Tay (1 out of 6 patents)

14. Regina Hayn (1 out of 2 patents)

15. Erwin Schoer (1 out of 2 patents)

12 patents: Sort by Forward Citations

1. 8450652 - Apparatus for thermally treating semiconductor substrates (2013-05-28),

2. 7412299 - Process for determining the temperature of a semiconductor wafer in a rapid heating unit (2008-08-12),

3. 7169717 - Method of producing a calibration wafer (2007-01-30),

4. 7151060 - Device and method for thermally treating semiconductor wafers (2006-12-19),

5. 7144826 - Method and apparatus for the production of process gas that includes water vapor and hydrogen formed by burning oxygen in a hydrogen-rich environment (2006-12-05),

6. 7144747 - Method for thermally treating a substrate that comprises several layers (2006-12-05),

7. 7098157 - Method and apparatus for thermally treating disk-shaped substrates (2006-08-29),

8. 7056389 - Method and device for thermal treatment of substrates (2006-06-06),

9. 6965093 - Device for thermally treating substrates (2005-11-15),

10. 6809011 - Adjusting of defect profiles in crystal or crystalline-like structures (2004-10-26),

11. 6775471 - Method and device for thermally treating objects (2004-08-10),

12. 6303524 - High temperature short time curing of low dielectric constant materials using rapid thermal processing techniques (2001-10-16),

Mattson Thermal Products GmbH specializes in the design and manufacturing of advanced thermal processing equipment for the semiconductor industry. With a focus on innovation, quality, and customer satisfaction, Mattson Thermal Products GmbH serves global clients with cutting-edge solutions for their thermal processing needs.

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USPTO Data Jan 1 1976 - Sep 15 2026

12 Patents

#1 in Dornstadt

#3,293 in Germany

#48,023 in the World

Dornstadt, Germany

Mattson Thermal Products Gmbh

Forward Citations = 94

27 inventors:

Markus Hauf (4 out of 62 patents)

Georg Roters (3 out of 4 patents)

Christoph Striebel (2 out of 4 patents)

4. Manfred Falter (2 out of 3 patents)

5. Christoph Merkl (2 out of 4 patents)

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