Location History:
- Catania, IT (2006)
- Dresden, DE (2006)
Company Filing History:
Years Active: 2006
Title: Erwin Schoer: Innovator in Semiconductor Technology
Introduction
Erwin Schoer is a notable inventor based in Catania, Italy, recognized for his contributions to semiconductor technology. With a total of two patents to his name, Schoer has made significant advancements in the thermal treatment of semiconductor wafers.
Latest Patents
Schoer's latest patents include a device and method for thermally treating semiconductor wafers. This innovative device is designed for wafers that have at least one silicon layer to be oxidized and a metal layer, preferably tungsten, which is not to be oxidized. The device features at least one radiation source and a treatment chamber that receives the substrate. The chamber includes a wall part that is substantially transparent to the radiation, along with a cover plate that prevents material from the substrate from depositing on the chamber's transparent wall.
Another significant patent involves a method for minimizing the vapor deposition of tungsten oxide during the selective side wall oxidation of tungsten-silicon gates. This method effectively reduces the vapor deposition of tungsten oxide by treating the gate structure with a hydrogen-containing, nonaqueous inert gas before and after a treatment step with a hydrogen/water mixture.
Career Highlights
Throughout his career, Schoer has worked with prominent companies in the semiconductor industry, including Mattson Thermal Products GmbH and Infineon Technologies AG. His work has contributed to advancements in semiconductor processing techniques and technologies.
Collaborations
Schoer has collaborated with notable professionals in the field, including Georg Roters and Steffen Frigge. These collaborations have further enhanced his contributions to semiconductor technology.
Conclusion
Erwin Schoer's innovative work in semiconductor technology, particularly in the thermal treatment of wafers, showcases his expertise and commitment to advancing the field. His patents reflect significant advancements that have the potential to impact the semiconductor industry positively.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.