Company Filing History:
Years Active: 2005-2013
Title: Manfred Falter: Innovator in Semiconductor Processing Technology
Introduction
Manfred Falter is a notable inventor based in Ulm, Germany, recognized for his contributions to semiconductor processing technology. With a total of three patents to his name, Falter has made significant advancements in the thermal treatment of semiconductor substrates.
Latest Patents
Falter's latest patents include an "Apparatus for thermally treating semiconductor substrates." This innovative apparatus features a processing space defined by first walls that are substantially parallel to the semiconductor substrate, along with a second side wall connected to the first walls. It includes a substrate holding device that defines a substrate retaining region for a semiconductor substrate within the processing space. The design incorporates heating elements positioned between the first walls and the substrate retaining region, effectively compensating for the thermal gradient between the edge and center of the semiconductor substrate. A shutter is also provided to limit radiation emitted by the heating elements towards the substrate retaining region.
Another significant patent is the "Method and system for thermally processing a plurality of wafer-shaped objects." This process allows for the thermal processing of wafer-shaped objects, such as semiconductor wafers, in a thermal processing chamber. The chamber is equipped with at least one heating device, and multiple wafers can be processed simultaneously in either a face-to-face or back-to-back configuration.
Career Highlights
Throughout his career, Manfred Falter has worked with prominent companies in the semiconductor industry, including Mattson Thermal Products GmbH and Mattson Technology, Inc. His experience in these organizations has contributed to his expertise in thermal processing technologies.
Collaborations
Falter has collaborated with several professionals in the field, including Zsolt Nenyei and Paul Janis Timans. These collaborations have further enriched his work and innovations in semiconductor processing.
Conclusion
Manfred Falter's contributions to semiconductor technology through his patents and career achievements highlight his role as an influential inventor in the industry. His work continues to impact the field of semiconductor processing significantly.
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